Details

Introduction to Focused Ion Beams


Introduction to Focused Ion Beams

Instrumentation, Theory, Techniques and Practice

von: Lucille A. Giannuzzi, Lucille A. North Carolina State University

117,69 €

Verlag: Springer
Format: PDF
Veröffentl.: 18.05.2006
ISBN/EAN: 9780387233130
Sprache: englisch
Anzahl Seiten: 358

Dieses eBook enthält ein Wasserzeichen.

Beschreibungen


Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.

Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.
The Focused Ion Beam Instrument.- Ion - Solid Interactions.- Focused Ion Beam Gases for Deposition and Enhanced Etch.- Three-Dimensional Nanofabrication Using Focused Ion Beams.- Device Edits and Modifications.- The Uses of Dual Beam FIB in Microelectronic Failure Analysis.- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy.- FIB for Materials Science Applications - a Review.- Practical Aspects of FIB Tem Specimen Preparation.- FIB Lift-Out Specimen Preparation Techniques.- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method.- Dual-Beam (FIB-SEM) Systems.- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS).- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy.- Application of FIB in Combination with Auger Electron Spectroscopy.

Only text that discusses and presents the theory directly related to applications and the only one that disscusses the vast applications and techniques used in FIBs and dual platform instruments

Introduction to Focused Ion Beams is geared towards techniques and applications. The first portion of this book introduces the basics of FIB instrumentation, milling, and deposition capabilities. The chapter dedicated to ion-solid interactions is presented so that the FIB user can understand which parameters will influence FIB milling behavior. The remainder of the book focuses on how to prepare and analyze samples using FIB and related tools, and presents specific applications and techniques of the uses of FIB milling, deposition, and dual platform techniques. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and Dual platform instruments

Diese Produkte könnten Sie auch interessieren:

High Thermal Conductivity Materials
High Thermal Conductivity Materials
von: Subhash L. Shinde, Jitendra Goela
PDF ebook
149,79 €
Nuclear Energy
Nuclear Energy
von: David Bodansky
PDF ebook
117,69 €